Modulo Front-End per wafer da 300 mm

BROOKS ASYST Spartan EFEM Sorter

Brooks Automation Wafer Front-End Module, 300mm, ASYST Spartan EFEM, Sorter

Model: ASYST Spartan EFEM
Type: Sorter
Condition: Used

Technical Data:
100–240V AC
50/60Hz
10A

General Information:
300 mm EFEM with 3 load ports, cleanroom mini-environment, and integrated wafer transfer robot
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This unit is an Equipment Front End Module (EFEM) from the ASYST Spartan series, designed for fully automated handling of 300 mm silicon wafers in semiconductor manufacturing.

It features three load ports, a mini-environment with ULPA air filters, internal lighting, comprehensive safety controls, as well as all necessary interfaces for system integration. Additionally, it is equipped with a fully integrated wafer transfer robot, which removes wafers from the FOUP/cassette load ports, separates them, and hands them off precisely to subsequent process modules.

Year of manufacture: 27.12.2010
Includes CD with operation, service, and installation manuals (9701-3060-01 Rev G)

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